Can be prepared in a variety of optical thin film devices with optical film occurred , such as conductive films, solar cells, antireflection film , used in electronic , digital , solar, glass , decoration and other industries.
Computer automation, interface design simple operation , high reproducibility of the coating , thickness meter crystal sensor configuration , automated deposition system, input parameters , process control and data storage capabilities , strengthen production management , reduce production costs , can be plated metal compound , an oxide film layer having good spectral curve stability , using electron beam evaporation source technology, the electron gun assembly of two sets of generating high heat to evaporate the plating material ,Generate high heat to evaporate plating materials , high-performance optical thick Monitor combined with the computer , the implementation of intelligent control, can achieve ultra- high-precision optical thick , the installation of automatic reverse design , operation time can be shortened deposition , to achieve high productivity and reduce production costs , using a combination of electrical control modular , easy to maintain, automatically rotating the workpiece holder.
Common optical film diagram:
Capacitive touch screen
Low-E Glass
Solar cell
Chamber size | D1300×H1300 | D1650×H1650 | D2000×H1650 |
Pumping system | KT800/molecular pump+RTO600+2X70+2X-15 | 2 sets KT800/molecular pump+RTO1200+2 sets 2X70+2X-15 | 2 sets KT800/molecular pump+RTO1200+2 sets 2X70+2X-15 |
Polycold | Temp -135℃,pumping speed 90000L/S,power 7.5KW | ||
Vacuum performance | Ultimate 5×10-4Pa, pumping speed:atmosphere to 5×10-3Pa less than 10min, pressure rising time:1×10-3Pa to 1×10-1Pa more than 10min | ||
Rotating jigs | Sphere or plain surface,5-20rev/vertical revolution jigs | Sphere or plain surface,5-20rev/vertical revolution jigs | Sphere or plain surface,5-20rev/vertical revolution jigs |
Electron gun | Single gun/resistance+magnetron sputtering | Single gun/resistance+magnetron sputtering | Single gun/resistance+magnetron sputtering |
Ion source | 15A hall ion source 1 set/rectangular ion source | 15A hall ion source 1 set/rectangular ion source | 15A hall ion source 1 set/rectangular ion source |
Crystal thickness meter | SQC-310 | SQC-310 | SQC-310 |
Wide spectrum monioring | 400-800nm multi-piece reflector | 400-800nm multi-piece reflector | 400-800nm multi-piece reflector |
LCD projector lens and optical parts
Liquid crystal
Organic EL
Consumer goods :
Camera
Digital cameras
Part of the lens and the optical recorder
Mobile LCD section
Cellular phones digital cameras
Automobile Association mirror
Shot
Telescope
Lens optical devices
Fax machine
Printer